TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 Spare Surplus Removed from a Nikon NSR

Removed from a Nikon NSR Series System This Yaskawa Electric CLSR-CA-4590N2BY1 Linear Motor PCB is used working surplus

Part No: 1018-538-01

Part No: AP1502S 2PW MV4 FV4 KYT/42

Part No: 70065-00037C

Inventory # CONO-343

TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 Spare Surplus Removed from a Nikon NSRTEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 No End Effector Model No: IFB Interface Block Robotics Arm Removed from a TEL Tokyo Electron Clean Track ACT12 200 200mm System Installed Components NSK Part No: MU U177 001 NSK Part No: JS2006FN509 NSK Part No: XY HRS55ZM123 Part No: 2987 416026 W2 IRA (ACT12 IPL), Y AXIS Part No: 2987 416028 W4 IRA (ACT12 IPL), Z AXIS Part No: 2987 416027 W1 IRA (ACT12 IPL), THETA AXIS Part No: 2987